*
* Techgen(tm) Tech file Generator.
* FullVersion        : 19.1.2-s160
* BuildNumber        : 160 
* IRBuildNumber      : 160 
* VersionDate        : Mon Apr 22 11:58:08 PDT 2019
* Bitness            : 64-bit
* 
*
process GPDK45_typical
*
*| temp_reference 25
*| auto_reorder_off true
*
deposition
*step #  material   p/n                 name        thick    diel.   side     bot     angle
step  1  substrate                       FOX       0.35  3.9
step  1  substrate                     Oxide       0.02  3.9
step  2  metal                     poly_conn       0.1  -0.003  
step  3  dielectric n                  diel1       0.03   7   0   0.03   90
step  4  dielectric p                  diel2       0.3  4.2
step  5  metal                   metal1_conn       0.15  s,w:0.06,0.06,0:0.06,0.08,0:0.06,0.09,0:0.06,0.13,0:0.06,0.16,0:0.06,0.19,0:0.06,0.26,0:0.06,0.38,0:0.06,0.5,0:0.06,0.63,0:0.06,0.83,0:0.06,1,0.01:0.06,1.5,0.01:0.06,3,0.01:0.06,4.05,0.01:0.08,0.06,0.01:0.08,0.08,0.01:0.08,0.09,0.01:0.08,0.13,0:0.08,0.16,0.01:0.08,0.19,0:0.08,0.26,0:0.08,0.38,0:0.08,0.5,0:0.08,0.63,0:0.08,0.83,0:0.08,1,0.01:0.08,1.5,0.01:0.08,3,0.01:0.08,4.05,0.01:0.09,0.06,0.01:0.09,0.08,0.01:0.09,0.09,0.01:0.09,0.13,0:0.09,0.16,0.01:0.09,0.19,0:0.09,0.26,0:0.09,0.38,0:0.09,0.5,0:0.09,0.63,0:0.09,0.83,0:0.09,1,0.01:0.09,1.5,0.01:0.09,3,0.01:0.09,4.05,0.01:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0:0.13,0.16,0.01:0.13,0.19,0:0.13,0.26,0:0.13,0.38,0:0.13,0.5,0:0.13,0.63,0:0.13,0.83,0:0.13,1,0.01:0.13,1.5,0.01:0.13,3,0.01:0.13,4.05,0.01:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0:0.16,0.16,0.01:0.16,0.19,0:0.16,0.26,0:0.16,0.38,0:0.16,0.5,0:0.16,0.63,0:0.16,0.83,0:0.16,1,0.01:0.16,1.5,0.01:0.16,3,0.01:0.16,4.05,0.01:0.19,0.06,0.02:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0:0.19,0.16,0.01:0.19,0.19,0:0.19,0.26,0:0.19,0.38,0:0.19,0.5,0:0.19,0.63,0:0.19,0.83,0:0.19,1,0.01:0.19,1.5,0.01:0.19,3,0.01:0.19,4.05,0.01:0.26,0.06,0.02:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0:0.26,0.16,0.01:0.26,0.19,0:0.26,0.26,0:0.26,0.38,0:0.26,0.5,0:0.26,0.63,0:0.26,0.83,0:0.26,1,0.01:0.26,1.5,0.01:0.26,3,0.01:0.26,4.05,0.01:0.38,0.06,0.02:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0:0.38,0.16,0.01:0.38,0.19,0:0.38,0.26,0:0.38,0.38,0:0.38,0.5,0:0.38,0.63,0:0.38,0.83,0:0.38,1,0.01:0.38,1.5,0.01:0.38,3,0.01:0.38,4.05,0.01:0.63,0.06,0.02:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0:0.63,0.16,0.01:0.63,0.19,0:0.63,0.26,0:0.63,0.38,0:0.63,0.5,0:0.63,0.63,0:0.63,0.83,0:0.63,1,0.01:0.63,1.5,0.01:0.63,3,0.01:0.63,4.05,0.01:0.83,0.06,0.02:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0:0.83,0.16,0.01:0.83,0.19,0:0.83,0.26,0:0.83,0.38,0:0.83,0.5,0:0.83,0.63,0:0.83,0.83,0:0.83,1,0.01:0.83,1.5,0.01:0.83,3,0.01:0.83,4.05,0.01:1.5,0.06,0.02:1.5,0.08,0.01:1.5,0.09,0.01:1.5,0.13,0:1.5,0.16,0.01:1.5,0.19,0:1.5,0.26,0:1.5,0.38,0:1.5,0.5,0:1.5,0.63,0:1.5,0.83,0:1.5,1,0.01:1.5,1.5,0.01:1.5,3,0.01:1.5,4.05,0.01:3,0.06,0.02:3,0.08,0.01:3,0.09,0.01:3,0.13,0:3,0.16,0.01:3,0.19,0:3,0.26,0:3,0.38,0:3,0.5,0:3,0.63,0:3,0.83,0:3,1,0.01:3,1.5,0.01:3,3,0.01:3,4.05,0.01:5,0.06,0.02:5,0.08,0.01:5,0.09,0.01:5,0.13,0:5,0.16,0.01:5,0.19,0:5,0.26,0:5,0.38,0:5,0.5,0:5,0.63,0:5,0.83,0:5,1,0.01:5,1.5,0.01:5,3,0.01:5,4.05,0.01 -0.01,0.01  100:tw:0.05,0.0599,1.19:0.05,0.0799,1.34:0.05,0.09,1.29:0.05,0.1299,1.24:0.05,0.1599,1.23:0.05,0.1899,1.22:0.05,0.2599,1.21:0.05,0.3799,1.18:0.05,0.5,1.16:0.05,0.6299,1.15:0.05,0.8299,1.13:0.05,1,1.11:0.05,1.5,1.09:0.05,3,1.04:0.05,4.05,1.02:0.1,0.0599,1.17:0.1,0.0799,1.32:0.1,0.09,1.27:0.1,0.1299,1.22:0.1,0.1599,1.22:0.1,0.1899,1.21:0.1,0.2599,1.2:0.1,0.3799,1.18:0.1,0.5,1.16:0.1,0.6299,1.15:0.1,0.8299,1.13:0.1,1,1.11:0.1,1.5,1.09:0.1,3,1.04:0.1,4.05,1.02:0.15,0.0599,1.16:0.15,0.0799,1.29:0.15,0.09,1.25:0.15,0.1299,1.21:0.15,0.1599,1.2:0.15,0.1899,1.2:0.15,0.2599,1.19:0.15,0.3799,1.18:0.15,0.5,1.16:0.15,0.6299,1.15:0.15,0.8299,1.13:0.15,1,1.11:0.15,1.5,1.09:0.15,3,1.04:0.15,4.05,1.02:0.2,0.0599,1.14:0.2,0.0799,1.26:0.2,0.09,1.23:0.2,0.1299,1.19:0.2,0.1599,1.19:0.2,0.1899,1.19:0.2,0.2599,1.18:0.2,0.3799,1.17:0.2,0.5,1.16:0.2,0.6299,1.15:0.2,0.8299,1.13:0.2,1,1.12:0.2,1.5,1.09:0.2,3,1.04:0.2,4.05,1.02:0.25,0.0599,1.13:0.25,0.0799,1.24:0.25,0.09,1.21:0.25,0.1299,1.18:0.25,0.1599,1.18:0.25,0.1899,1.18:0.25,0.2599,1.17:0.25,0.3799,1.16:0.25,0.5,1.15:0.25,0.6299,1.14:0.25,0.8299,1.13:0.25,1,1.12:0.25,1.5,1.09:0.25,3,1.04:0.25,4.05,1.02:0.3,0.0599,1.11:0.3,0.0799,1.23:0.3,0.09,1.19:0.3,0.1299,1.17:0.3,0.1599,1.17:0.3,0.1899,1.17:0.3,0.2599,1.16:0.3,0.3799,1.15:0.3,0.5,1.14:0.3,0.6299,1.13:0.3,0.8299,1.12:0.3,1,1.11:0.3,1.5,1.09:0.3,3,1.04:0.3,4.05,1.02:0.35,0.0599,1.09:0.35,0.0799,1.22:0.35,0.09,1.18:0.35,0.1299,1.17:0.35,0.1599,1.16:0.35,0.1899,1.16:0.35,0.2599,1.15:0.35,0.3799,1.14:0.35,0.5,1.13:0.35,0.6299,1.12:0.35,0.8299,1.11:0.35,1,1.1:0.35,1.5,1.09:0.35,3,1.04:0.35,4.05,1.02:0.4,0.0599,1.07:0.4,0.0799,1.21:0.4,0.09,1.16:0.4,0.1299,1.16:0.4,0.1599,1.16:0.4,0.1899,1.15:0.4,0.2599,1.14:0.4,0.3799,1.13:0.4,0.5,1.12:0.4,0.6299,1.11:0.4,0.8299,1.1:0.4,1,1.09:0.4,1.5,1.09:0.4,3,1.04:0.4,4.05,1.02:0.45,0.0599,1.04:0.45,0.0799,1.21:0.45,0.09,1.15:0.45,0.1299,1.15:0.45,0.1599,1.15:0.45,0.1899,1.14:0.45,0.2599,1.13:0.45,0.3799,1.12:0.45,0.5,1.11:0.45,0.6299,1.1:0.45,0.8299,1.09:0.45,1,1.08:0.45,1.5,1.08:0.45,3,1.04:0.45,4.05,1.02:0.5,0.0599,1.02:0.5,0.0799,1.19:0.5,0.09,1.13:0.5,0.1299,1.15:0.5,0.1599,1.14:0.5,0.1899,1.13:0.5,0.2599,1.12:0.5,0.3799,1.11:0.5,0.5,1.1:0.5,0.6299,1.09:0.5,0.8299,1.08:0.5,1,1.07:0.5,1.5,1.07:0.5,3,1.04:0.5,4.05,1.02:0.55,0.0599,1.02:0.55,0.0799,1.16:0.55,0.09,1.11:0.55,0.1299,1.13:0.55,0.1599,1.13:0.55,0.1899,1.12:0.55,0.2599,1.11:0.55,0.3799,1.1:0.55,0.5,1.09:0.55,0.6299,1.08:0.55,0.8299,1.07:0.55,1,1.07:0.55,1.5,1.06:0.55,3,1.03:0.55,4.05,1.02:0.6,0.0599,1.02:0.6,0.0799,1.14:0.6,0.09,1.09:0.6,0.1299,1.11:0.6,0.1599,1.11:0.6,0.1899,1.11:0.6,0.2599,1.1:0.6,0.3799,1.09:0.6,0.5,1.08:0.6,0.6299,1.08:0.6,0.8299,1.07:0.6,1,1.06:0.6,1.5,1.05:0.6,3,1.03:0.6,4.05,1.01:0.65,0.0599,1.02:0.65,0.0799,1.14:0.65,0.09,1.09:0.65,0.1299,1.09:0.65,0.1599,1.08:0.65,0.1899,1.08:0.65,0.2599,1.08:0.65,0.3799,1.08:0.65,0.5,1.08:0.65,0.6299,1.07:0.65,0.8299,1.07:0.65,1,1.06:0.65,1.5,1.04:0.65,3,1.02:0.65,4.05,1.01:0.7,0.0599,1.02:0.7,0.0799,1.14:0.7,0.09,1.09:0.7,0.1299,1.08:0.7,0.1599,1.05:0.7,0.1899,1.05:0.7,0.2599,1.06:0.7,0.3799,1.06:0.7,0.5,1.07:0.7,0.6299,1.07:0.7,0.8299,1.06:0.7,1,1.06:0.7,1.5,1.03:0.7,3,1.01:0.7,4.05,1.01:0.75,0.0599,1.02:0.75,0.0799,1.14:0.75,0.09,1.09:0.75,0.1299,1.08:0.75,0.1599,1.05:0.75,0.1899,1.02:0.75,0.2599,1.02:0.75,0.3799,1.04:0.75,0.5,1.05:0.75,0.6299,1.06:0.75,0.8299,1.06:0.75,1,1.05:0.75,1.5,1.01:0.75,3,1.01:0.75,4.05,1:0.8,0.0599,1.02:0.8,0.0799,1.14:0.8,0.09,1.09:0.8,0.1299,1.08:0.8,0.1599,1.05:0.8,0.1899,1.02:0.8,0.2599,0.98:0.8,0.3799,1.01:0.8,0.5,1.04:0.8,0.6299,1.05:0.8,0.8299,1.05:0.8,1,1.05:0.8,1.5,0.99:0.8,3,1:0.8,4.05,0.99:0.85,0.0599,1.02:0.85,0.0799,1.14:0.85,0.09,1.09:0.85,0.1299,1.08:0.85,0.1599,1.05:0.85,0.1899,1.02:0.85,0.2599,0.98:0.85,0.3799,0.97:0.85,0.5,1.01:0.85,0.6299,1.03:0.85,0.8299,1.04:0.85,1,1.04:0.85,1.5,0.97:0.85,3,0.98:0.85,4.05,0.97:0.9,0.0599,1.02:0.9,0.0799,1.14:0.9,0.09,1.09:0.9,0.1299,1.08:0.9,0.1599,1.05:0.9,0.1899,1.02:0.9,0.2599,0.98:0.9,0.3799,0.96:0.9,0.5,0.97:0.9,0.6299,1:0.9,0.8299,1.03:0.9,1,1.02:0.9,1.5,0.94:0.9,3,0.96:0.9,4.05,0.95:0.95,0.0599,1.02:0.95,0.0799,1.14:0.95,0.09,1.09:0.95,0.1299,1.08:0.95,0.1599,1.05:0.95,0.1899,1.02:0.95,0.2599,0.98:0.95,0.3799,0.96:0.95,0.5,0.97:0.95,0.6299,0.99:0.95,0.8299,1.01:0.95,1,1:0.95,1.5,0.9:0.95,3,0.93:0.95,4.05,0.91:1,0.0599,1.02:1,0.0799,1.14:1,0.09,1.09:1,0.1299,1.08:1,0.1599,1.05:1,0.1899,1.02:1,0.2599,0.98:1,0.3799,0.96:1,0.5,0.97:1,0.6299,0.99:1,0.8299,1.01:1,1,1:1,1.5,0.88:1,3,0.9:1,4.05,0.87 
step  6  dielectric p                  diel3       0  4.2
step  7  dielectric p                  diel4       0.3  2.6
step  8  metal                   metal2_conn       0.15  s,w:0.06,0.06,0:0.06,0.08,0:0.06,0.09,0:0.06,0.13,0:0.06,0.16,0:0.06,0.19,0:0.06,0.26,0:0.06,0.38,0:0.06,0.5,0:0.06,0.63,0:0.06,0.83,0:0.06,1,0:0.06,1.5,0:0.06,3,0:0.06,4.05,0:0.08,0.06,0:0.08,0.08,0:0.08,0.09,0:0.08,0.13,0:0.08,0.16,0:0.08,0.19,0:0.08,0.26,0:0.08,0.38,0:0.08,0.5,0:0.08,0.63,0:0.08,0.83,0:0.08,1,0:0.08,1.5,0:0.08,3,0:0.08,4.05,0:0.09,0.06,0:0.09,0.08,0:0.09,0.09,0:0.09,0.13,0:0.09,0.16,0:0.09,0.19,0:0.09,0.26,0:0.09,0.38,0:0.09,0.5,0:0.09,0.63,0:0.09,0.83,0:0.09,1,0:0.09,1.5,0:0.09,3,0:0.09,4.05,0:0.13,0.06,0.01:0.13,0.08,0.01:0.13,0.09,0.01:0.13,0.13,0:0.13,0.16,0:0.13,0.19,0:0.13,0.26,0:0.13,0.38,0:0.13,0.5,0:0.13,0.63,0:0.13,0.83,0:0.13,1,0:0.13,1.5,0:0.13,3,0:0.13,4.05,0:0.16,0.06,0.01:0.16,0.08,0.01:0.16,0.09,0.01:0.16,0.13,0:0.16,0.16,0:0.16,0.19,0:0.16,0.26,0:0.16,0.38,0:0.16,0.5,0:0.16,0.63,0:0.16,0.83,0:0.16,1,0:0.16,1.5,0:0.16,3,0:0.16,4.05,0:0.19,0.06,0.01:0.19,0.08,0.01:0.19,0.09,0.01:0.19,0.13,0:0.19,0.16,0:0.19,0.19,0:0.19,0.26,0:0.19,0.38,0:0.19,0.5,0:0.19,0.63,0:0.19,0.83,0:0.19,1,0:0.19,1.5,0:0.19,3,0:0.19,4.05,0:0.26,0.06,0.01:0.26,0.08,0.01:0.26,0.09,0.01:0.26,0.13,0:0.26,0.16,0:0.26,0.19,0:0.26,0.26,0:0.26,0.38,0:0.26,0.5,0:0.26,0.63,0:0.26,0.83,0:0.26,1,0:0.26,1.5,0:0.26,3,0:0.26,4.05,0:0.38,0.06,0.01:0.38,0.08,0.01:0.38,0.09,0.01:0.38,0.13,0:0.38,0.16,0:0.38,0.19,0:0.38,0.26,0:0.38,0.38,0:0.38,0.5,0:0.38,0.63,0:0.38,0.83,0:0.38,1,0:0.38,1.5,0:0.38,3,0:0.38,4.05,0:0.63,0.06,0.01:0.63,0.08,0.01:0.63,0.09,0.01:0.63,0.13,0:0.63,0.16,0:0.63,0.19,0:0.63,0.26,0:0.63,0.38,0:0.63,0.5,0:0.63,0.63,0:0.63,0.83,0:0.63,1,0:0.63,1.5,0:0.63,3,0:0.63,4.05,0:0.83,0.06,0.01:0.83,0.08,0.01:0.83,0.09,0.01:0.83,0.13,0:0.83,0.16,0:0.83,0.19,0:0.83,0.26,0:0.83,0.38,0:0.83,0.5,0:0.83,0.63,0:0.83,0.83,0:0.83,1,0:0.83,1.5,0:0.83,3,0:0.83,4.05,0:1.5,0.06,0.01:1.5,0.08,0.01:1.5,0.09,0.01:1.5,0.13,0:1.5,0.16,0:1.5,0.19,0:1.5,0.26,0:1.5,0.38,0:1.5,0.5,0:1.5,0.63,0:1.5,0.83,0:1.5,1,0:1.5,1.5,0:1.5,3,0:1.5,4.05,0:3,0.06,0.01:3,0.08,0.01:3,0.09,0.01:3,0.13,0:3,0.16,0:3,0.19,0:3,0.26,0:3,0.38,0:3,0.5,0:3,0.63,0:3,0.83,0:3,1,0:3,1.5,0:3,3,0:3,4.05,0:5,0.06,0.01:5,0.08,0.01:5,0.09,0.01:5,0.13,0:5,0.16,0:5,0.19,0:5,0.26,0:5,0.38,0:5,0.5,0:5,0.63,0:5,0.83,0:5,1,0:5,1.5,0:5,3,0:5,4.05,0 -0.01,0.01  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
step  9  dielectric p                  diel5       0  4.2
step 10  dielectric p                  diel6       0.3  2.6
step 11  metal                   metal3_conn       0.15  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-0.01,0.01  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
step 12  dielectric p                  diel7       0  4.2
step 13  dielectric p                  diel8       0.3  2.6
step 14  metal                   metal4_conn       0.15  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-0.01,0.01  100:tw:0.05,0.0599,1.19:0.05,0.0799,1.25:0.05,0.09,1.26:0.05,0.1299,1.24:0.05,0.1599,1.25:0.05,0.1899,1.26:0.05,0.2599,1.26:0.05,0.3799,1.26:0.05,0.5,1.25:0.05,0.6299,1.23:0.05,0.8299,1.2:0.05,1,1.18:0.05,1.5,1.17:0.05,3,1.13:0.05,4.05,1.08:0.1,0.0599,1.19:0.1,0.0799,1.25:0.1,0.09,1.25:0.1,0.1299,1.23:0.1,0.1599,1.24:0.1,0.1899,1.25:0.1,0.2599,1.25:0.1,0.3799,1.26:0.1,0.5,1.25:0.1,0.6299,1.23:0.1,0.8299,1.2:0.1,1,1.18:0.1,1.5,1.17:0.1,3,1.13:0.1,4.05,1.08:0.15,0.0599,1.18:0.15,0.0799,1.24:0.15,0.09,1.24:0.15,0.1299,1.23:0.15,0.1599,1.24:0.15,0.1899,1.24:0.15,0.2599,1.25:0.15,0.3799,1.25:0.15,0.5,1.24:0.15,0.6299,1.23:0.15,0.8299,1.2:0.15,1,1.18:0.15,1.5,1.17:0.15,3,1.13:0.15,4.05,1.08:0.2,0.0599,1.18:0.2,0.0799,1.23:0.2,0.09,1.24:0.2,0.1299,1.24:0.2,0.1599,1.24:0.2,0.1899,1.24:0.2,0.2599,1.24:0.2,0.3799,1.24:0.2,0.5,1.24:0.2,0.6299,1.23:0.2,0.8299,1.21:0.2,1,1.19:0.2,1.5,1.17:0.2,3,1.13:0.2,4.05,1.08:0.25,0.0599,1.18:0.25,0.0799,1.23:0.25,0.09,1.24:0.25,0.1299,1.24:0.25,0.1599,1.24:0.25,0.1899,1.24:0.25,0.2599,1.24:0.25,0.3799,1.24:0.25,0.5,1.23:0.25,0.6299,1.22:0.25,0.8299,1.21:0.25,1,1.2:0.25,1.5,1.18:0.25,3,1.13:0.25,4.05,1.08:0.3,0.0599,1.17:0.3,0.0799,1.23:0.3,0.09,1.24:0.3,0.1299,1.24:0.3,0.1599,1.24:0.3,0.1899,1.24:0.3,0.2599,1.24:0.3,0.3799,1.23:0.3,0.5,1.23:0.3,0.6299,1.22:0.3,0.8299,1.21:0.3,1,1.2:0.3,1.5,1.18:0.3,3,1.13:0.3,4.05,1.08:0.35,0.0599,1.15:0.35,0.0799,1.23:0.35,0.09,1.24:0.35,0.1299,1.23:0.35,0.1599,1.23:0.35,0.1899,1.23:0.35,0.2599,1.23:0.35,0.3799,1.23:0.35,0.5,1.22:0.35,0.6299,1.21:0.35,0.8299,1.2:0.35,1,1.19:0.35,1.5,1.17:0.35,3,1.13:0.35,4.05,1.08:0.4,0.0599,1.12:0.4,0.0799,1.21:0.4,0.09,1.24:0.4,0.1299,1.23:0.4,0.1599,1.23:0.4,0.1899,1.23:0.4,0.2599,1.23:0.4,0.3799,1.22:0.4,0.5,1.22:0.4,0.6299,1.21:0.4,0.8299,1.2:0.4,1,1.19:0.4,1.5,1.16:0.4,3,1.13:0.4,4.05,1.08:0.45,0.0599,1.06:0.45,0.0799,1.18:0.45,0.09,1.22:0.45,0.1299,1.21:0.45,0.1599,1.22:0.45,0.1899,1.22:0.45,0.2599,1.22:0.45,0.3799,1.22:0.45,0.5,1.22:0.45,0.6299,1.21:0.45,0.8299,1.2:0.45,1,1.19:0.45,1.5,1.15:0.45,3,1.12:0.45,4.05,1.08:0.5,0.0599,0.98:0.5,0.0799,1.12:0.5,0.09,1.17:0.5,0.1299,1.19:0.5,0.1599,1.2:0.5,0.1899,1.2:0.5,0.2599,1.21:0.5,0.3799,1.21:0.5,0.5,1.22:0.5,0.6299,1.21:0.5,0.8299,1.2:0.5,1,1.19:0.5,1.5,1.14:0.5,3,1.1:0.5,4.05,1.11:0.55,0.0599,0.98:0.55,0.0799,1.01:0.55,0.09,1.06:0.55,0.1299,1.17:0.55,0.1599,1.17:0.55,0.1899,1.18:0.55,0.2599,1.19:0.55,0.3799,1.21:0.55,0.5,1.21:0.55,0.6299,1.22:0.55,0.8299,1.21:0.55,1,1.19:0.55,1.5,1.13:0.55,3,1.08:0.55,4.05,1.1:0.6,0.0599,0.98:0.6,0.0799,1.01:0.6,0.09,1:0.6,0.1299,1.13:0.6,0.1599,1.14:0.6,0.1899,1.15:0.6,0.2599,1.17:0.6,0.3799,1.2:0.6,0.5,1.21:0.6,0.6299,1.22:0.6,0.8299,1.21:0.6,1,1.2:0.6,1.5,1.13:0.6,3,1.07:0.6,4.05,1.08:0.65,0.0599,0.98:0.65,0.0799,1.01:0.65,0.09,1:0.65,0.1299,1.09:0.65,0.1599,1.11:0.65,0.1899,1.12:0.65,0.2599,1.15:0.65,0.3799,1.18:0.65,0.5,1.21:0.65,0.6299,1.22:0.65,0.8299,1.22:0.65,1,1.21:0.65,1.5,1.13:0.65,3,1.06:0.65,4.05,1.05:0.7,0.0599,0.98:0.7,0.0799,1.01:0.7,0.09,1:0.7,0.1299,1.09:0.7,0.1599,1.07:0.7,0.1899,1.08:0.7,0.2599,1.11:0.7,0.3799,1.16:0.7,0.5,1.19:0.7,0.6299,1.21:0.7,0.8299,1.22:0.7,1,1.21:0.7,1.5,1.14:0.7,3,1.07:0.7,4.05,1.05:0.75,0.0599,0.98:0.75,0.0799,1.01:0.75,0.09,1:0.75,0.1299,1.09:0.75,0.1599,1.07:0.75,0.1899,1.03:0.75,0.2599,1.07:0.75,0.3799,1.13:0.75,0.5,1.17:0.75,0.6299,1.2:0.75,0.8299,1.21:0.75,1,1.21:0.75,1.5,1.14:0.75,3,1.08:0.75,4.05,1.06:0.8,0.0599,0.98:0.8,0.0799,1.01:0.8,0.09,1:0.8,0.1299,1.09:0.8,0.1599,1.07:0.8,0.1899,1.03:0.8,0.2599,1.03:0.8,0.3799,1.09:0.8,0.5,1.14:0.8,0.6299,1.17:0.8,0.8299,1.19:0.8,1,1.2:0.8,1.5,1.14:0.8,3,1.09:0.8,4.05,1.07:0.85,0.0599,0.98:0.85,0.0799,1.01:0.85,0.09,1:0.85,0.1299,1.09:0.85,0.1599,1.07:0.85,0.1899,1.03:0.85,0.2599,1.03:0.85,0.3799,1.03:0.85,0.5,1.08:0.85,0.6299,1.12:0.85,0.8299,1.16:0.85,1,1.16:0.85,1.5,1.12:0.85,3,1.09:0.85,4.05,1.09:0.9,0.0599,0.98:0.9,0.0799,1.01:0.9,0.09,1:0.9,0.1299,1.09:0.9,0.1599,1.07:0.9,0.1899,1.03:0.9,0.2599,1.03:0.9,0.3799,1.03:0.9,0.5,1.04:0.9,0.6299,1.05:0.9,0.8299,1.09:0.9,1,1.11:0.9,1.5,1.09:0.9,3,1.08:0.9,4.05,1.08:0.95,0.0599,0.98:0.95,0.0799,1.01:0.95,0.09,1:0.95,0.1299,1.09:0.95,0.1599,1.07:0.95,0.1899,1.03:0.95,0.2599,1.03:0.95,0.3799,1.03:0.95,0.5,1.04:0.95,0.6299,1.05:0.95,0.8299,1.05:0.95,1,1.04:0.95,1.5,1.02:0.95,3,1.02:0.95,4.05,1.02:1,0.0599,0.98:1,0.0799,1.01:1,0.09,1:1,0.1299,1.09:1,0.1599,1.07:1,0.1899,1.03:1,0.2599,1.03:1,0.3799,1.03:1,0.5,1.04:1,0.6299,1.05:1,0.8299,1.05:1,1,1.04:1,1.5,1.01:1,3,0.96:1,4.05,0.93 
step 15  dielectric p                  diel9       0  4.2
step 16  dielectric p                 diel10       0.3  2.6
step 17  metal                   metal5_conn       0.15  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-0.01,0.01  100:tw:0.05,0.0599,1.19:0.05,0.0799,1.25:0.05,0.09,1.26:0.05,0.1299,1.24:0.05,0.1599,1.25:0.05,0.1899,1.26:0.05,0.2599,1.26:0.05,0.3799,1.26:0.05,0.5,1.25:0.05,0.6299,1.23:0.05,0.8299,1.2:0.05,1,1.18:0.05,1.5,1.17:0.05,3,1.13:0.05,4.05,1.08:0.1,0.0599,1.19:0.1,0.0799,1.25:0.1,0.09,1.25:0.1,0.1299,1.23:0.1,0.1599,1.24:0.1,0.1899,1.25:0.1,0.2599,1.25:0.1,0.3799,1.26:0.1,0.5,1.25:0.1,0.6299,1.23:0.1,0.8299,1.2:0.1,1,1.18:0.1,1.5,1.17:0.1,3,1.13:0.1,4.05,1.08:0.15,0.0599,1.18:0.15,0.0799,1.24:0.15,0.09,1.24:0.15,0.1299,1.23:0.15,0.1599,1.24:0.15,0.1899,1.24:0.15,0.2599,1.25:0.15,0.3799,1.25:0.15,0.5,1.24:0.15,0.6299,1.23:0.15,0.8299,1.2:0.15,1,1.18:0.15,1.5,1.17:0.15,3,1.13:0.15,4.05,1.08:0.2,0.0599,1.18:0.2,0.0799,1.23:0.2,0.09,1.24:0.2,0.1299,1.24:0.2,0.1599,1.24:0.2,0.1899,1.24:0.2,0.2599,1.24:0.2,0.3799,1.24:0.2,0.5,1.24:0.2,0.6299,1.23:0.2,0.8299,1.21:0.2,1,1.19:0.2,1.5,1.17:0.2,3,1.13:0.2,4.05,1.08:0.25,0.0599,1.18:0.25,0.0799,1.23:0.25,0.09,1.24:0.25,0.1299,1.24:0.25,0.1599,1.24:0.25,0.1899,1.24:0.25,0.2599,1.24:0.25,0.3799,1.24:0.25,0.5,1.23:0.25,0.6299,1.22:0.25,0.8299,1.21:0.25,1,1.2:0.25,1.5,1.18:0.25,3,1.13:0.25,4.05,1.08:0.3,0.0599,1.17:0.3,0.0799,1.23:0.3,0.09,1.24:0.3,0.1299,1.24:0.3,0.1599,1.24:0.3,0.1899,1.24:0.3,0.2599,1.24:0.3,0.3799,1.23:0.3,0.5,1.23:0.3,0.6299,1.22:0.3,0.8299,1.21:0.3,1,1.2:0.3,1.5,1.18:0.3,3,1.13:0.3,4.05,1.08:0.35,0.0599,1.15:0.35,0.0799,1.23:0.35,0.09,1.24:0.35,0.1299,1.23:0.35,0.1599,1.23:0.35,0.1899,1.23:0.35,0.2599,1.23:0.35,0.3799,1.23:0.35,0.5,1.22:0.35,0.6299,1.21:0.35,0.8299,1.2:0.35,1,1.19:0.35,1.5,1.17:0.35,3,1.13:0.35,4.05,1.08:0.4,0.0599,1.12:0.4,0.0799,1.21:0.4,0.09,1.24:0.4,0.1299,1.23:0.4,0.1599,1.23:0.4,0.1899,1.23:0.4,0.2599,1.23:0.4,0.3799,1.22:0.4,0.5,1.22:0.4,0.6299,1.21:0.4,0.8299,1.2:0.4,1,1.19:0.4,1.5,1.16:0.4,3,1.13:0.4,4.05,1.08:0.45,0.0599,1.06:0.45,0.0799,1.18:0.45,0.09,1.22:0.45,0.1299,1.21:0.45,0.1599,1.22:0.45,0.1899,1.22:0.45,0.2599,1.22:0.45,0.3799,1.22:0.45,0.5,1.22:0.45,0.6299,1.21:0.45,0.8299,1.2:0.45,1,1.19:0.45,1.5,1.15:0.45,3,1.12:0.45,4.05,1.08:0.5,0.0599,0.98:0.5,0.0799,1.12:0.5,0.09,1.17:0.5,0.1299,1.19:0.5,0.1599,1.2:0.5,0.1899,1.2:0.5,0.2599,1.21:0.5,0.3799,1.21:0.5,0.5,1.22:0.5,0.6299,1.21:0.5,0.8299,1.2:0.5,1,1.19:0.5,1.5,1.14:0.5,3,1.1:0.5,4.05,1.11:0.55,0.0599,0.98:0.55,0.0799,1.01:0.55,0.09,1.06:0.55,0.1299,1.17:0.55,0.1599,1.17:0.55,0.1899,1.18:0.55,0.2599,1.19:0.55,0.3799,1.21:0.55,0.5,1.21:0.55,0.6299,1.22:0.55,0.8299,1.21:0.55,1,1.19:0.55,1.5,1.13:0.55,3,1.08:0.55,4.05,1.1:0.6,0.0599,0.98:0.6,0.0799,1.01:0.6,0.09,1:0.6,0.1299,1.13:0.6,0.1599,1.14:0.6,0.1899,1.15:0.6,0.2599,1.17:0.6,0.3799,1.2:0.6,0.5,1.21:0.6,0.6299,1.22:0.6,0.8299,1.21:0.6,1,1.2:0.6,1.5,1.13:0.6,3,1.07:0.6,4.05,1.08:0.65,0.0599,0.98:0.65,0.0799,1.01:0.65,0.09,1:0.65,0.1299,1.09:0.65,0.1599,1.11:0.65,0.1899,1.12:0.65,0.2599,1.15:0.65,0.3799,1.18:0.65,0.5,1.21:0.65,0.6299,1.22:0.65,0.8299,1.22:0.65,1,1.21:0.65,1.5,1.13:0.65,3,1.06:0.65,4.05,1.05:0.7,0.0599,0.98:0.7,0.0799,1.01:0.7,0.09,1:0.7,0.1299,1.09:0.7,0.1599,1.07:0.7,0.1899,1.08:0.7,0.2599,1.11:0.7,0.3799,1.16:0.7,0.5,1.19:0.7,0.6299,1.21:0.7,0.8299,1.22:0.7,1,1.21:0.7,1.5,1.14:0.7,3,1.07:0.7,4.05,1.05:0.75,0.0599,0.98:0.75,0.0799,1.01:0.75,0.09,1:0.75,0.1299,1.09:0.75,0.1599,1.07:0.75,0.1899,1.03:0.75,0.2599,1.07:0.75,0.3799,1.13:0.75,0.5,1.17:0.75,0.6299,1.2:0.75,0.8299,1.21:0.75,1,1.21:0.75,1.5,1.14:0.75,3,1.08:0.75,4.05,1.06:0.8,0.0599,0.98:0.8,0.0799,1.01:0.8,0.09,1:0.8,0.1299,1.09:0.8,0.1599,1.07:0.8,0.1899,1.03:0.8,0.2599,1.03:0.8,0.3799,1.09:0.8,0.5,1.14:0.8,0.6299,1.17:0.8,0.8299,1.19:0.8,1,1.2:0.8,1.5,1.14:0.8,3,1.09:0.8,4.05,1.07:0.85,0.0599,0.98:0.85,0.0799,1.01:0.85,0.09,1:0.85,0.1299,1.09:0.85,0.1599,1.07:0.85,0.1899,1.03:0.85,0.2599,1.03:0.85,0.3799,1.03:0.85,0.5,1.08:0.85,0.6299,1.12:0.85,0.8299,1.16:0.85,1,1.16:0.85,1.5,1.12:0.85,3,1.09:0.85,4.05,1.09:0.9,0.0599,0.98:0.9,0.0799,1.01:0.9,0.09,1:0.9,0.1299,1.09:0.9,0.1599,1.07:0.9,0.1899,1.03:0.9,0.2599,1.03:0.9,0.3799,1.03:0.9,0.5,1.04:0.9,0.6299,1.05:0.9,0.8299,1.09:0.9,1,1.11:0.9,1.5,1.09:0.9,3,1.08:0.9,4.05,1.08:0.95,0.0599,0.98:0.95,0.0799,1.01:0.95,0.09,1:0.95,0.1299,1.09:0.95,0.1599,1.07:0.95,0.1899,1.03:0.95,0.2599,1.03:0.95,0.3799,1.03:0.95,0.5,1.04:0.95,0.6299,1.05:0.95,0.8299,1.05:0.95,1,1.04:0.95,1.5,1.02:0.95,3,1.02:0.95,4.05,1.02:1,0.0599,0.98:1,0.0799,1.01:1,0.09,1:1,0.1299,1.09:1,0.1599,1.07:1,0.1899,1.03:1,0.2599,1.03:1,0.3799,1.03:1,0.5,1.04:1,0.6299,1.05:1,0.8299,1.05:1,1,1.04:1,1.5,1.01:1,3,0.96:1,4.05,0.93 
step 18  dielectric p                 diel11       0  4.2
step 19  dielectric p                 diel12       0.3  2.6
step 20  metal                   metal6_conn       0.15  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-0.01,0.01  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
step 21  dielectric p                 diel13       0  4.2
step 22  dielectric p                 diel14       0.3  2.6
step 23  metal                   metal7_conn       0.15  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-0.01,0.01  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
step 24  dielectric p                 diel15       0  4.2
step 25  dielectric p                 diel16       0.3  2.6
step 26  metal                   metal8_conn       0.15  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-0.01,0.01  100:tw:0.05,0.0599,1.19:0.05,0.0799,1.25:0.05,0.09,1.26:0.05,0.1299,1.24:0.05,0.1599,1.25:0.05,0.1899,1.26:0.05,0.2599,1.26:0.05,0.3799,1.26:0.05,0.5,1.25:0.05,0.6299,1.23:0.05,0.8299,1.2:0.05,1,1.18:0.05,1.5,1.17:0.05,3,1.13:0.05,4.05,1.08:0.1,0.0599,1.19:0.1,0.0799,1.25:0.1,0.09,1.25:0.1,0.1299,1.23:0.1,0.1599,1.24:0.1,0.1899,1.25:0.1,0.2599,1.25:0.1,0.3799,1.26:0.1,0.5,1.25:0.1,0.6299,1.23:0.1,0.8299,1.2:0.1,1,1.18:0.1,1.5,1.17:0.1,3,1.13:0.1,4.05,1.08:0.15,0.0599,1.18:0.15,0.0799,1.24:0.15,0.09,1.24:0.15,0.1299,1.23:0.15,0.1599,1.24:0.15,0.1899,1.24:0.15,0.2599,1.25:0.15,0.3799,1.25:0.15,0.5,1.24:0.15,0.6299,1.23:0.15,0.8299,1.2:0.15,1,1.18:0.15,1.5,1.17:0.15,3,1.13:0.15,4.05,1.08:0.2,0.0599,1.18:0.2,0.0799,1.23:0.2,0.09,1.24:0.2,0.1299,1.24:0.2,0.1599,1.24:0.2,0.1899,1.24:0.2,0.2599,1.24:0.2,0.3799,1.24:0.2,0.5,1.24:0.2,0.6299,1.23:0.2,0.8299,1.21:0.2,1,1.19:0.2,1.5,1.17:0.2,3,1.13:0.2,4.05,1.08:0.25,0.0599,1.18:0.25,0.0799,1.23:0.25,0.09,1.24:0.25,0.1299,1.24:0.25,0.1599,1.24:0.25,0.1899,1.24:0.25,0.2599,1.24:0.25,0.3799,1.24:0.25,0.5,1.23:0.25,0.6299,1.22:0.25,0.8299,1.21:0.25,1,1.2:0.25,1.5,1.18:0.25,3,1.13:0.25,4.05,1.08:0.3,0.0599,1.17:0.3,0.0799,1.23:0.3,0.09,1.24:0.3,0.1299,1.24:0.3,0.1599,1.24:0.3,0.1899,1.24:0.3,0.2599,1.24:0.3,0.3799,1.23:0.3,0.5,1.23:0.3,0.6299,1.22:0.3,0.8299,1.21:0.3,1,1.2:0.3,1.5,1.18:0.3,3,1.13:0.3,4.05,1.08:0.35,0.0599,1.15:0.35,0.0799,1.23:0.35,0.09,1.24:0.35,0.1299,1.23:0.35,0.1599,1.23:0.35,0.1899,1.23:0.35,0.2599,1.23:0.35,0.3799,1.23:0.35,0.5,1.22:0.35,0.6299,1.21:0.35,0.8299,1.2:0.35,1,1.19:0.35,1.5,1.17:0.35,3,1.13:0.35,4.05,1.08:0.4,0.0599,1.12:0.4,0.0799,1.21:0.4,0.09,1.24:0.4,0.1299,1.23:0.4,0.1599,1.23:0.4,0.1899,1.23:0.4,0.2599,1.23:0.4,0.3799,1.22:0.4,0.5,1.22:0.4,0.6299,1.21:0.4,0.8299,1.2:0.4,1,1.19:0.4,1.5,1.16:0.4,3,1.13:0.4,4.05,1.08:0.45,0.0599,1.06:0.45,0.0799,1.18:0.45,0.09,1.22:0.45,0.1299,1.21:0.45,0.1599,1.22:0.45,0.1899,1.22:0.45,0.2599,1.22:0.45,0.3799,1.22:0.45,0.5,1.22:0.45,0.6299,1.21:0.45,0.8299,1.2:0.45,1,1.19:0.45,1.5,1.15:0.45,3,1.12:0.45,4.05,1.08:0.5,0.0599,0.98:0.5,0.0799,1.12:0.5,0.09,1.17:0.5,0.1299,1.19:0.5,0.1599,1.2:0.5,0.1899,1.2:0.5,0.2599,1.21:0.5,0.3799,1.21:0.5,0.5,1.22:0.5,0.6299,1.21:0.5,0.8299,1.2:0.5,1,1.19:0.5,1.5,1.14:0.5,3,1.1:0.5,4.05,1.11:0.55,0.0599,0.98:0.55,0.0799,1.01:0.55,0.09,1.06:0.55,0.1299,1.17:0.55,0.1599,1.17:0.55,0.1899,1.18:0.55,0.2599,1.19:0.55,0.3799,1.21:0.55,0.5,1.21:0.55,0.6299,1.22:0.55,0.8299,1.21:0.55,1,1.19:0.55,1.5,1.13:0.55,3,1.08:0.55,4.05,1.1:0.6,0.0599,0.98:0.6,0.0799,1.01:0.6,0.09,1:0.6,0.1299,1.13:0.6,0.1599,1.14:0.6,0.1899,1.15:0.6,0.2599,1.17:0.6,0.3799,1.2:0.6,0.5,1.21:0.6,0.6299,1.22:0.6,0.8299,1.21:0.6,1,1.2:0.6,1.5,1.13:0.6,3,1.07:0.6,4.05,1.08:0.65,0.0599,0.98:0.65,0.0799,1.01:0.65,0.09,1:0.65,0.1299,1.09:0.65,0.1599,1.11:0.65,0.1899,1.12:0.65,0.2599,1.15:0.65,0.3799,1.18:0.65,0.5,1.21:0.65,0.6299,1.22:0.65,0.8299,1.22:0.65,1,1.21:0.65,1.5,1.13:0.65,3,1.06:0.65,4.05,1.05:0.7,0.0599,0.98:0.7,0.0799,1.01:0.7,0.09,1:0.7,0.1299,1.09:0.7,0.1599,1.07:0.7,0.1899,1.08:0.7,0.2599,1.11:0.7,0.3799,1.16:0.7,0.5,1.19:0.7,0.6299,1.21:0.7,0.8299,1.22:0.7,1,1.21:0.7,1.5,1.14:0.7,3,1.07:0.7,4.05,1.05:0.75,0.0599,0.98:0.75,0.0799,1.01:0.75,0.09,1:0.75,0.1299,1.09:0.75,0.1599,1.07:0.75,0.1899,1.03:0.75,0.2599,1.07:0.75,0.3799,1.13:0.75,0.5,1.17:0.75,0.6299,1.2:0.75,0.8299,1.21:0.75,1,1.21:0.75,1.5,1.14:0.75,3,1.08:0.75,4.05,1.06:0.8,0.0599,0.98:0.8,0.0799,1.01:0.8,0.09,1:0.8,0.1299,1.09:0.8,0.1599,1.07:0.8,0.1899,1.03:0.8,0.2599,1.03:0.8,0.3799,1.09:0.8,0.5,1.14:0.8,0.6299,1.17:0.8,0.8299,1.19:0.8,1,1.2:0.8,1.5,1.14:0.8,3,1.09:0.8,4.05,1.07:0.85,0.0599,0.98:0.85,0.0799,1.01:0.85,0.09,1:0.85,0.1299,1.09:0.85,0.1599,1.07:0.85,0.1899,1.03:0.85,0.2599,1.03:0.85,0.3799,1.03:0.85,0.5,1.08:0.85,0.6299,1.12:0.85,0.8299,1.16:0.85,1,1.16:0.85,1.5,1.12:0.85,3,1.09:0.85,4.05,1.09:0.9,0.0599,0.98:0.9,0.0799,1.01:0.9,0.09,1:0.9,0.1299,1.09:0.9,0.1599,1.07:0.9,0.1899,1.03:0.9,0.2599,1.03:0.9,0.3799,1.03:0.9,0.5,1.04:0.9,0.6299,1.05:0.9,0.8299,1.09:0.9,1,1.11:0.9,1.5,1.09:0.9,3,1.08:0.9,4.05,1.08:0.95,0.0599,0.98:0.95,0.0799,1.01:0.95,0.09,1:0.95,0.1299,1.09:0.95,0.1599,1.07:0.95,0.1899,1.03:0.95,0.2599,1.03:0.95,0.3799,1.03:0.95,0.5,1.04:0.95,0.6299,1.05:0.95,0.8299,1.05:0.95,1,1.04:0.95,1.5,1.02:0.95,3,1.02:0.95,4.05,1.02:1,0.0599,0.98:1,0.0799,1.01:1,0.09,1:1,0.1299,1.09:1,0.1599,1.07:1,0.1899,1.03:1,0.2599,1.03:1,0.3799,1.03:1,0.5,1.04:1,0.6299,1.05:1,0.8299,1.05:1,1,1.04:1,1.5,1.01:1,3,0.96:1,4.05,0.93 
step 27  dielectric p                 diel17       0  4.2
step 28  dielectric p                 diel18       0.3  2.6
step 29  metal                   metal9_conn       1  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-0.01,0.01  100:tw:0.05,0.0599,1.19:0.05,0.0799,1.25:0.05,0.09,1.26:0.05,0.1299,1.24:0.05,0.1599,1.25:0.05,0.1899,1.26:0.05,0.2599,1.26:0.05,0.3799,1.26:0.05,0.5,1.25:0.05,0.6299,1.23:0.05,0.8299,1.2:0.05,1,1.18:0.05,1.5,1.17:0.05,3,1.13:0.05,4.05,1.08:0.1,0.0599,1.19:0.1,0.0799,1.25:0.1,0.09,1.25:0.1,0.1299,1.23:0.1,0.1599,1.24:0.1,0.1899,1.25:0.1,0.2599,1.25:0.1,0.3799,1.26:0.1,0.5,1.25:0.1,0.6299,1.23:0.1,0.8299,1.2:0.1,1,1.18:0.1,1.5,1.17:0.1,3,1.13:0.1,4.05,1.08:0.15,0.0599,1.18:0.15,0.0799,1.24:0.15,0.09,1.24:0.15,0.1299,1.23:0.15,0.1599,1.24:0.15,0.1899,1.24:0.15,0.2599,1.25:0.15,0.3799,1.25:0.15,0.5,1.24:0.15,0.6299,1.23:0.15,0.8299,1.2:0.15,1,1.18:0.15,1.5,1.17:0.15,3,1.13:0.15,4.05,1.08:0.2,0.0599,1.18:0.2,0.0799,1.23:0.2,0.09,1.24:0.2,0.1299,1.24:0.2,0.1599,1.24:0.2,0.1899,1.24:0.2,0.2599,1.24:0.2,0.3799,1.24:0.2,0.5,1.24:0.2,0.6299,1.23:0.2,0.8299,1.21:0.2,1,1.19:0.2,1.5,1.17:0.2,3,1.13:0.2,4.05,1.08:0.25,0.0599,1.18:0.25,0.0799,1.23:0.25,0.09,1.24:0.25,0.1299,1.24:0.25,0.1599,1.24:0.25,0.1899,1.24:0.25,0.2599,1.24:0.25,0.3799,1.24:0.25,0.5,1.23:0.25,0.6299,1.22:0.25,0.8299,1.21:0.25,1,1.2:0.25,1.5,1.18:0.25,3,1.13:0.25,4.05,1.08:0.3,0.0599,1.17:0.3,0.0799,1.23:0.3,0.09,1.24:0.3,0.1299,1.24:0.3,0.1599,1.24:0.3,0.1899,1.24:0.3,0.2599,1.24:0.3,0.3799,1.23:0.3,0.5,1.23:0.3,0.6299,1.22:0.3,0.8299,1.21:0.3,1,1.2:0.3,1.5,1.18:0.3,3,1.13:0.3,4.05,1.08:0.35,0.0599,1.15:0.35,0.0799,1.23:0.35,0.09,1.24:0.35,0.1299,1.23:0.35,0.1599,1.23:0.35,0.1899,1.23:0.35,0.2599,1.23:0.35,0.3799,1.23:0.35,0.5,1.22:0.35,0.6299,1.21:0.35,0.8299,1.2:0.35,1,1.19:0.35,1.5,1.17:0.35,3,1.13:0.35,4.05,1.08:0.4,0.0599,1.12:0.4,0.0799,1.21:0.4,0.09,1.24:0.4,0.1299,1.23:0.4,0.1599,1.23:0.4,0.1899,1.23:0.4,0.2599,1.23:0.4,0.3799,1.22:0.4,0.5,1.22:0.4,0.6299,1.21:0.4,0.8299,1.2:0.4,1,1.19:0.4,1.5,1.16:0.4,3,1.13:0.4,4.05,1.08:0.45,0.0599,1.06:0.45,0.0799,1.18:0.45,0.09,1.22:0.45,0.1299,1.21:0.45,0.1599,1.22:0.45,0.1899,1.22:0.45,0.2599,1.22:0.45,0.3799,1.22:0.45,0.5,1.22:0.45,0.6299,1.21:0.45,0.8299,1.2:0.45,1,1.19:0.45,1.5,1.15:0.45,3,1.12:0.45,4.05,1.08:0.5,0.0599,0.98:0.5,0.0799,1.12:0.5,0.09,1.17:0.5,0.1299,1.19:0.5,0.1599,1.2:0.5,0.1899,1.2:0.5,0.2599,1.21:0.5,0.3799,1.21:0.5,0.5,1.22:0.5,0.6299,1.21:0.5,0.8299,1.2:0.5,1,1.19:0.5,1.5,1.14:0.5,3,1.1:0.5,4.05,1.11:0.55,0.0599,0.98:0.55,0.0799,1.01:0.55,0.09,1.06:0.55,0.1299,1.17:0.55,0.1599,1.17:0.55,0.1899,1.18:0.55,0.2599,1.19:0.55,0.3799,1.21:0.55,0.5,1.21:0.55,0.6299,1.22:0.55,0.8299,1.21:0.55,1,1.19:0.55,1.5,1.13:0.55,3,1.08:0.55,4.05,1.1:0.6,0.0599,0.98:0.6,0.0799,1.01:0.6,0.09,1:0.6,0.1299,1.13:0.6,0.1599,1.14:0.6,0.1899,1.15:0.6,0.2599,1.17:0.6,0.3799,1.2:0.6,0.5,1.21:0.6,0.6299,1.22:0.6,0.8299,1.21:0.6,1,1.2:0.6,1.5,1.13:0.6,3,1.07:0.6,4.05,1.08:0.65,0.0599,0.98:0.65,0.0799,1.01:0.65,0.09,1:0.65,0.1299,1.09:0.65,0.1599,1.11:0.65,0.1899,1.12:0.65,0.2599,1.15:0.65,0.3799,1.18:0.65,0.5,1.21:0.65,0.6299,1.22:0.65,0.8299,1.22:0.65,1,1.21:0.65,1.5,1.13:0.65,3,1.06:0.65,4.05,1.05:0.7,0.0599,0.98:0.7,0.0799,1.01:0.7,0.09,1:0.7,0.1299,1.09:0.7,0.1599,1.07:0.7,0.1899,1.08:0.7,0.2599,1.11:0.7,0.3799,1.16:0.7,0.5,1.19:0.7,0.6299,1.21:0.7,0.8299,1.22:0.7,1,1.21:0.7,1.5,1.14:0.7,3,1.07:0.7,4.05,1.05:0.75,0.0599,0.98:0.75,0.0799,1.01:0.75,0.09,1:0.75,0.1299,1.09:0.75,0.1599,1.07:0.75,0.1899,1.03:0.75,0.2599,1.07:0.75,0.3799,1.13:0.75,0.5,1.17:0.75,0.6299,1.2:0.75,0.8299,1.21:0.75,1,1.21:0.75,1.5,1.14:0.75,3,1.08:0.75,4.05,1.06:0.8,0.0599,0.98:0.8,0.0799,1.01:0.8,0.09,1:0.8,0.1299,1.09:0.8,0.1599,1.07:0.8,0.1899,1.03:0.8,0.2599,1.03:0.8,0.3799,1.09:0.8,0.5,1.14:0.8,0.6299,1.17:0.8,0.8299,1.19:0.8,1,1.2:0.8,1.5,1.14:0.8,3,1.09:0.8,4.05,1.07:0.85,0.0599,0.98:0.85,0.0799,1.01:0.85,0.09,1:0.85,0.1299,1.09:0.85,0.1599,1.07:0.85,0.1899,1.03:0.85,0.2599,1.03:0.85,0.3799,1.03:0.85,0.5,1.08:0.85,0.6299,1.12:0.85,0.8299,1.16:0.85,1,1.16:0.85,1.5,1.12:0.85,3,1.09:0.85,4.05,1.09:0.9,0.0599,0.98:0.9,0.0799,1.01:0.9,0.09,1:0.9,0.1299,1.09:0.9,0.1599,1.07:0.9,0.1899,1.03:0.9,0.2599,1.03:0.9,0.3799,1.03:0.9,0.5,1.04:0.9,0.6299,1.05:0.9,0.8299,1.09:0.9,1,1.11:0.9,1.5,1.09:0.9,3,1.08:0.9,4.05,1.08:0.95,0.0599,0.98:0.95,0.0799,1.01:0.95,0.09,1:0.95,0.1299,1.09:0.95,0.1599,1.07:0.95,0.1899,1.03:0.95,0.2599,1.03:0.95,0.3799,1.03:0.95,0.5,1.04:0.95,0.6299,1.05:0.95,0.8299,1.05:0.95,1,1.04:0.95,1.5,1.02:0.95,3,1.02:0.95,4.05,1.02:1,0.0599,0.98:1,0.0799,1.01:1,0.09,1:1,0.1299,1.09:1,0.1599,1.07:1,0.1899,1.03:1,0.2599,1.03:1,0.3799,1.03:1,0.5,1.04:1,0.6299,1.05:1,0.8299,1.05:1,1,1.04:1,1.5,1.01:1,3,0.96:1,4.05,0.93 
step 30  dielectric p                 diel19       0  4.2
step 31  dielectric p                 diel20       0.6  4.2
step 32  metal                  metal10_conn       1  s,w:0.26,0.26,0:0.26,0.38,0:0.26,0.5,0:0.26,0.63,0:0.26,0.83,0:0.26,1,0:0.26,1.5,0:0.26,3,0:0.26,4.05,0:0.38,0.26,0:0.38,0.38,0:0.38,0.5,0:0.38,0.63,0:0.38,0.83,0:0.38,1,0:0.38,1.5,0:0.38,3,0:0.38,4.05,0:0.63,0.26,0:0.63,0.38,0:0.63,0.5,0:0.63,0.63,0:0.63,0.83,0:0.63,1,0:0.63,1.5,0:0.63,3,0:0.63,4.05,0:0.83,0.26,0.01:0.83,0.38,0.01:0.83,0.5,0.01:0.83,0.63,0:0.83,0.83,0:0.83,1,0:0.83,1.5,0:0.83,3,0:0.83,4.05,0:1.5,0.26,0.01:1.5,0.38,0.01:1.5,0.5,0.01:1.5,0.63,0:1.5,0.83,0:1.5,1,0:1.5,1.5,0:1.5,3,0:1.5,4.05,0:3,0.26,0.01:3,0.38,0.01:3,0.5,0.01:3,0.63,0:3,0.83,0:3,1,0:3,1.5,0:3,3,0:3,4.05,0:5,0.26,0.01:5,0.38,0.01:5,0.5,0.01:5,0.63,0:5,0.83,0:5,1,0:5,1.5,0:5,3,0:5,4.05,0 -0.01,0.01  100:tw:0.05,0.0599,1.19:0.05,0.0799,1.25:0.05,0.09,1.26:0.05,0.1299,1.24:0.05,0.1599,1.25:0.05,0.1899,1.26:0.05,0.2599,1.26:0.05,0.3799,1.26:0.05,0.5,1.25:0.05,0.6299,1.23:0.05,0.8299,1.2:0.05,1,1.18:0.05,1.5,1.17:0.05,3,1.13:0.05,4.05,1.08:0.1,0.0599,1.19:0.1,0.0799,1.25:0.1,0.09,1.25:0.1,0.1299,1.23:0.1,0.1599,1.24:0.1,0.1899,1.25:0.1,0.2599,1.25:0.1,0.3799,1.26:0.1,0.5,1.25:0.1,0.6299,1.23:0.1,0.8299,1.2:0.1,1,1.18:0.1,1.5,1.17:0.1,3,1.13:0.1,4.05,1.08:0.15,0.0599,1.18:0.15,0.0799,1.24:0.15,0.09,1.24:0.15,0.1299,1.23:0.15,0.1599,1.24:0.15,0.1899,1.24:0.15,0.2599,1.25:0.15,0.3799,1.25:0.15,0.5,1.24:0.15,0.6299,1.23:0.15,0.8299,1.2:0.15,1,1.18:0.15,1.5,1.17:0.15,3,1.13:0.15,4.05,1.08:0.2,0.0599,1.18:0.2,0.0799,1.23:0.2,0.09,1.24:0.2,0.1299,1.24:0.2,0.1599,1.24:0.2,0.1899,1.24:0.2,0.2599,1.24:0.2,0.3799,1.24:0.2,0.5,1.24:0.2,0.6299,1.23:0.2,0.8299,1.21:0.2,1,1.19:0.2,1.5,1.17:0.2,3,1.13:0.2,4.05,1.08:0.25,0.0599,1.18:0.25,0.0799,1.23:0.25,0.09,1.24:0.25,0.1299,1.24:0.25,0.1599,1.24:0.25,0.1899,1.24:0.25,0.2599,1.24:0.25,0.3799,1.24:0.25,0.5,1.23:0.25,0.6299,1.22:0.25,0.8299,1.21:0.25,1,1.2:0.25,1.5,1.18:0.25,3,1.13:0.25,4.05,1.08:0.3,0.0599,1.17:0.3,0.0799,1.23:0.3,0.09,1.24:0.3,0.1299,1.24:0.3,0.1599,1.24:0.3,0.1899,1.24:0.3,0.2599,1.24:0.3,0.3799,1.23:0.3,0.5,1.23:0.3,0.6299,1.22:0.3,0.8299,1.21:0.3,1,1.2:0.3,1.5,1.18:0.3,3,1.13:0.3,4.05,1.08:0.35,0.0599,1.15:0.35,0.0799,1.23:0.35,0.09,1.24:0.35,0.1299,1.23:0.35,0.1599,1.23:0.35,0.1899,1.23:0.35,0.2599,1.23:0.35,0.3799,1.23:0.35,0.5,1.22:0.35,0.6299,1.21:0.35,0.8299,1.2:0.35,1,1.19:0.35,1.5,1.17:0.35,3,1.13:0.35,4.05,1.08:0.4,0.0599,1.12:0.4,0.0799,1.21:0.4,0.09,1.24:0.4,0.1299,1.23:0.4,0.1599,1.23:0.4,0.1899,1.23:0.4,0.2599,1.23:0.4,0.3799,1.22:0.4,0.5,1.22:0.4,0.6299,1.21:0.4,0.8299,1.2:0.4,1,1.19:0.4,1.5,1.16:0.4,3,1.13:0.4,4.05,1.08:0.45,0.0599,1.06:0.45,0.0799,1.18:0.45,0.09,1.22:0.45,0.1299,1.21:0.45,0.1599,1.22:0.45,0.1899,1.22:0.45,0.2599,1.22:0.45,0.3799,1.22:0.45,0.5,1.22:0.45,0.6299,1.21:0.45,0.8299,1.2:0.45,1,1.19:0.45,1.5,1.15:0.45,3,1.12:0.45,4.05,1.08:0.5,0.0599,0.98:0.5,0.0799,1.12:0.5,0.09,1.17:0.5,0.1299,1.19:0.5,0.1599,1.2:0.5,0.1899,1.2:0.5,0.2599,1.21:0.5,0.3799,1.21:0.5,0.5,1.22:0.5,0.6299,1.21:0.5,0.8299,1.2:0.5,1,1.19:0.5,1.5,1.14:0.5,3,1.1:0.5,4.05,1.11:0.55,0.0599,0.98:0.55,0.0799,1.01:0.55,0.09,1.06:0.55,0.1299,1.17:0.55,0.1599,1.17:0.55,0.1899,1.18:0.55,0.2599,1.19:0.55,0.3799,1.21:0.55,0.5,1.21:0.55,0.6299,1.22:0.55,0.8299,1.21:0.55,1,1.19:0.55,1.5,1.13:0.55,3,1.08:0.55,4.05,1.1:0.6,0.0599,0.98:0.6,0.0799,1.01:0.6,0.09,1:0.6,0.1299,1.13:0.6,0.1599,1.14:0.6,0.1899,1.15:0.6,0.2599,1.17:0.6,0.3799,1.2:0.6,0.5,1.21:0.6,0.6299,1.22:0.6,0.8299,1.21:0.6,1,1.2:0.6,1.5,1.13:0.6,3,1.07:0.6,4.05,1.08:0.65,0.0599,0.98:0.65,0.0799,1.01:0.65,0.09,1:0.65,0.1299,1.09:0.65,0.1599,1.11:0.65,0.1899,1.12:0.65,0.2599,1.15:0.65,0.3799,1.18:0.65,0.5,1.21:0.65,0.6299,1.22:0.65,0.8299,1.22:0.65,1,1.21:0.65,1.5,1.13:0.65,3,1.06:0.65,4.05,1.05:0.7,0.0599,0.98:0.7,0.0799,1.01:0.7,0.09,1:0.7,0.1299,1.09:0.7,0.1599,1.07:0.7,0.1899,1.08:0.7,0.2599,1.11:0.7,0.3799,1.16:0.7,0.5,1.19:0.7,0.6299,1.21:0.7,0.8299,1.22:0.7,1,1.21:0.7,1.5,1.14:0.7,3,1.07:0.7,4.05,1.05:0.75,0.0599,0.98:0.75,0.0799,1.01:0.75,0.09,1:0.75,0.1299,1.09:0.75,0.1599,1.07:0.75,0.1899,1.03:0.75,0.2599,1.07:0.75,0.3799,1.13:0.75,0.5,1.17:0.75,0.6299,1.2:0.75,0.8299,1.21:0.75,1,1.21:0.75,1.5,1.14:0.75,3,1.08:0.75,4.05,1.06:0.8,0.0599,0.98:0.8,0.0799,1.01:0.8,0.09,1:0.8,0.1299,1.09:0.8,0.1599,1.07:0.8,0.1899,1.03:0.8,0.2599,1.03:0.8,0.3799,1.09:0.8,0.5,1.14:0.8,0.6299,1.17:0.8,0.8299,1.19:0.8,1,1.2:0.8,1.5,1.14:0.8,3,1.09:0.8,4.05,1.07:0.85,0.0599,0.98:0.85,0.0799,1.01:0.85,0.09,1:0.85,0.1299,1.09:0.85,0.1599,1.07:0.85,0.1899,1.03:0.85,0.2599,1.03:0.85,0.3799,1.03:0.85,0.5,1.08:0.85,0.6299,1.12:0.85,0.8299,1.16:0.85,1,1.16:0.85,1.5,1.12:0.85,3,1.09:0.85,4.05,1.09:0.9,0.0599,0.98:0.9,0.0799,1.01:0.9,0.09,1:0.9,0.1299,1.09:0.9,0.1599,1.07:0.9,0.1899,1.03:0.9,0.2599,1.03:0.9,0.3799,1.03:0.9,0.5,1.04:0.9,0.6299,1.05:0.9,0.8299,1.09:0.9,1,1.11:0.9,1.5,1.09:0.9,3,1.08:0.9,4.05,1.08:0.95,0.0599,0.98:0.95,0.0799,1.01:0.95,0.09,1:0.95,0.1299,1.09:0.95,0.1599,1.07:0.95,0.1899,1.03:0.95,0.2599,1.03:0.95,0.3799,1.03:0.95,0.5,1.04:0.95,0.6299,1.05:0.95,0.8299,1.05:0.95,1,1.04:0.95,1.5,1.02:0.95,3,1.02:0.95,4.05,1.02:1,0.0599,0.98:1,0.0799,1.01:1,0.09,1:1,0.1299,1.09:1,0.1599,1.07:1,0.1899,1.03:1,0.2599,1.03:1,0.3799,1.03:1,0.5,1.04:1,0.6299,1.05:1,0.8299,1.05:1,1,1.04:1,1.5,1.01:1,3,0.96:1,4.05,0.93 
step 33  dielectric p                 diel21       0  4.2
step 34  dielectric p                 diel22       0.6  4.2
step 35  metal                  metal11_conn       1.4  0 -0.01,0.01  
step 36  dielectric p                 diel23       0  4.2
step 37  dielectric p                 diel24       0.65  4.2
step 38  dielectric p                 diel25       0.75  8
step 39  dielectric p                    air       40  1
enddeposition

metal_variations auto_comb
layer poly_conn w  0.045 
layer poly_conn s  0.04 
layer metal1_conn w  0.06 
layer metal1_conn s  0.06 
layer metal2_conn w  0.08 
layer metal2_conn s  0.07 
layer metal3_conn w  0.08 
layer metal3_conn s  0.07 
layer metal4_conn w  0.08 
layer metal4_conn s  0.07 
layer metal5_conn w  0.08 
layer metal5_conn s  0.07 
layer metal6_conn w  0.08 
layer metal6_conn s  0.07 
layer metal7_conn w  0.08 
layer metal7_conn s  0.07 
layer metal8_conn w  0.08 
layer metal8_conn s  0.07 
layer metal9_conn w  0.08 
layer metal9_conn s  0.07 
layer metal10_conn w  0.22 
layer metal10_conn s  0.2 
layer metal11_conn w  0.22 
layer metal11_conn s  0.2 
endmetal_variations

endprocess

